High Temporal Resolution Ion Energy Distribution Functions in HIPIMS Discharges

Ion distribution functions at the electrodes of capacitively coupled high-pressure hydrogen discharges

The flux-energy distribution functions of H3 ions at the electrodes of capacitively coupled parallel plate discharges operated in a regime of relatively high gas pressures (200–650 Pa) are investigated experimentally using (differentially pumped) energy-resolved mass spectrometry under various conditions and compared with the results of a numeric simulation and a model. It is shown that the sim...

Limits to ion energy control in high density glow discharges: easurement of absolute metastable ion concentrations

Unprecedented demands for uniformity, throughput, anisotropy, and damage control in submicron pattern transfer are spurring development of new, low pressure, high charge density plasma reactors, Wafer biasing, independent of plasma production in these new systems is intended to provide improved ion flux and energy control so that selectivity can be optimized and damage can be minimized. However...

High-resolution gamma ray spectroscopy measurements of the fast ion energy distribution in JET 4He plasmas

High-resolution γ -ray measurements were carried out on the Joint European Torus (JET) in an experiment aimed at accelerating 4He ions in the MeV range by coupling third harmonic radio frequency heating to an injected 4He beam. For the first time, Doppler broadening of γ -ray peaks from the 12C(d, pγ )13C and 9Be(α, nγ )12C reactions was observed and interpreted with dedicated Monte Carlo codes...

Ion energy distribution functions of vacuum arc plasmas

Improving High Resolution TEM Images using Low Energy Ion Milling

Ion beam milling has become a widespread specimen preparation technique for non-biological materials over the last two decades, particularly for cross-sectional and plan-view transmission electron microscope (TEM) specimens. The basic principle of ion milling involves bombarding a specimen with energetic ions or neutral atoms acclerated and formed into a tightly focused ion beam. Material is sp...